| 1. | Analysis of dynamic characteristics of micro machine tool
可重构机床 |
| 2. | General requirements for electrical micro machine for automatic control system
控制微电机基本技术要求 |
| 3. | 4 . according to micro machining processes , a process flow is planed to make the piezoresistive sensor chip successfully
4 .基于某些微加工工艺制订了一套工艺流程,成功制作了前面所设计的压阻式微压力传感器芯片。 |
| 4. | In this paper , three micro pressure sensors are designed and one of them is fabricated by the micro machining technology
本文主要对微压力传感器的相关部分进行设计,并在研究相关微加工工艺的基础上制作了一种验证性的压阻式微压力传感器。 |
| 5. | In order to validate the performance of the cnc system of the micro machine tool , the small parts were machined by the 3 - axis cnc system
为验证微小型机床数控硬件系统的性能及应用软件的各项功能,在三轴联动微小型机床上使用该数控系统进行了微小型零件的加工。 |
| 6. | Micro pressure sensor is simple but widely used , and it is studied and industrialized very early . micro machining technology is important for fabrication of some mems products
微压力传感器是在微机电系统领域最早开始研究并且产业化的微机电器件之一,微机电系统以微加工工艺为重点研究内容。 |
| 7. | The most of the successful micro machined sensors adopt the construction of micro cantilevers . for example , the resonant pressure micro sensors , and the micro machined force - balance capacitive accelerometers
而较成功的微机电传感器,如谐振式压力传感器和力平衡式电容微加速度传感器,均采用了微悬臂梁结构。 |
| 8. | Results of the research and experiments in this paper are beneficial to deign and fabrication of micro pressure sensors . the micro machining technology can also be used for other mems products
论文的相关研究和实验结果对于微压力传感器的设计、制作具有一定的参考价值,微加工工艺的相关研究结论也可以应用在其它微机电器件的制作上。 |
| 9. | Because of the special needs of the micro machine tool , the module about data acquisition of the videomicroscopy used to clearly observe micro tools and small dimension workpiece was exploited through vfw software tool kit
针对微小机床的特殊要求,通过vfw软件工具包特别开发了显微镜视频采集模块,从而在操作界面上可清晰观察到微小铣刀及小尺寸工件。 |
| 10. | A lot of micro machining technologies are developed to fabricating memss . recently , lithograph of thick resist has been regarded as an effective and economical technology for manufacturing excellent high - aspect - ratio microstructures ( harms )
近年来，作为制作优质大高宽比微结构的厚层抗蚀剂光刻术以其工艺简单、制作成本低等优点受到国际上广泛重视。 |
