| 1. | The effects of pitch angle , rolling angle , pad velocity , rotation speed and standard nominal clearance on load and moments were obtained by analyzing the numerical results , and the effects of external load , external moments ( x - axis and y - axis ) , rotation speed and pad velocity on fluid pressure distribution , on tilt angles , azimuth angle and standard nominal clearance are further studied . the reason for the existence of negative pressure in ctp and its effect on the polishing result was discussed . it is proved that ctp can achieve the best
通过对仿真结果的分析,给出了工件倾角、转角、抛光速率、角速度及中心膜厚等主要研抛参数变化时工件的承载能力变化,也即压力积分载荷、压力转矩的变化;分析了外加载荷、 x / y轴转矩、抛光速率、角速度变化对加工过程中工件偏转角、方位角及中心膜厚的影响;讨论了全膜接触模型中负压产生的原因及对研抛结果的影响。 |
