Chinese translation for "sputter deposition"
|
- 溅射淀积
Related Translations:
- Example Sentences:
| 1. | Research of some typical problems in sputtering deposition 溅射成膜中几个问题的探讨 | | 2. | This thesis detailedly discussed die preparation of zrn films with microware - ecr plasma enhanced magnetron sputtering deposition ( mw - ecrpemsd ) technology 本文探讨了制备zrn薄膜的微波- ecr等离子体增强非平衡磁控溅射沉积工艺。 | | 3. | For vlsi , a plane surface may be approximated by depositing the interlevel dielectric by bias - sputter deposition ( see section 9 . 2 . 4 ) or by using planarization 对于超大规模集成电路的平面状表面,可以用偏置溅射淀积法的层间介质淀积(见9 2 4节)或用平面化工艺来近似获得。 | | 4. | Bidirectional diffusion between silicon and tini thin film has been exhibited in eds linescan curves , along with mapping distribution micrographs . moreover , a ternary titanium nickel silicide - nisti2si , is formed during sputtering deposition , which is determined by xrd analysis 大量试验表明:配比为35nil : 27inl : 118rnl的hfgyo3a12o腐蚀系统对twi薄膜具有较快的腐蚀速率,而且对8的腐蚀不明显,因而适合于硅基tini形状记忆薄膜的湿法腐蚀。 | | 5. | Centering at soft x - ray multilayer uniformity technology , we introduce general situation of multilayer , design of multilayer structure , simulation calculation , ion - beam sputtering deposition and evaluation of samples . above all , we carry out study of improving uniformity of period thickness spatial distribution , and develop correction mask for controlling period thickness . as a result , we improve uniformity from 4 . 5 % to 2 . 0 % , the error of period thickness on ( 130nm field is controlled within 0 . 18nm , and the reflectivity reach 35 % at center wavelength 17 . 1nm 特别地,我们设计并应用膜厚挡板补偿技术控制多层膜的膜厚分布,将膜厚分布非均匀性从4 . 5减小到2 ,周期厚度绝对差值控制在0 . 18nm以内,并且制备得实际多层膜样品在中心波长17 . 1nm处实测反射率达到35 ,达到实用水平。 |
- Similar Words:
- "sputt" Chinese translation, "sputter" Chinese translation, "sputter cleaning" Chinese translation, "sputter coater" Chinese translation, "sputter coating" Chinese translation, "sputter etch" Chinese translation, "sputter etch process" Chinese translation, "sputter etching" Chinese translation, "sputter gun" Chinese translation, "sputter ion mass spectrometer" Chinese translation
|
|
|