There are two characters in this study : ( 1 ) considering the capillary attraction and van der wall force under nano - scale and observing the fact that the hardness without considering adhesion effect is much larger ; ( 2 ) obtaining hardness by the energy method and considering the effects of elastic work due to elastic recovery and adhesion work due to adhesive forces 本论文最大特色在于( 1 )在奈米尺度下,考虑凡得瓦力及毛细管作用力对于奈米压痕试验之影响,并发现如果不考虑黏滞效应所得之硬度将远大于薄膜真实硬度? ( 2 )以能量的方式求得硬度,并考虑材料弹性回复所产生的弹性功与黏滞效应所产生的黏滞功两者对硬度之影响。