A planar film of refractive index nf is sandwiched between a substrate and a cover material . 折射率为nf的平面薄膜夹在感光衬底和覆盖层之间。
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Aberration arising from the use of flat plates 平面薄膜使用误差
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The technics of two kinds of thin film gas sensors made by powder sputtering are introduced . the structure and the experimental results of basic parameters are given in this paper 摘要介绍了用粉末溅射做出的两种平面薄膜型酒敏元件的工艺、芯片结构和基本参数测试的结果。