Test method for crystallographic perfection of silicon by preferential etch techniques 硅晶体完整性化学择优腐蚀检验方法
2.
The method of determining interstitial oxygen content in silicon by infrared absorption 硅晶体中间隙氧含量的红外吸收测量方法
3.
Testing method of resistivity for silicon crystals and silicon wafers with four - point probe 用四点探针法对硅晶体和硅片电阻率的测试方法
4.
Test method for determination of impurity concentrations in silicon crystal by photoluminescence spectroscopy 用光致发光光谱法测定硅晶体中杂质浓度的试验方法
5.
Testing of materials for semiconductor technology - determination of defect types and defect densities of silicon epitaxial layers 半导体工艺材料的检验.硅晶体外延层缺陷种类和缺陷密
