| 1. | Laser ablation and micromachining with femtosecond laser pulse
飞秒脉冲的激光损伤及微加工 |
| 2. | Thermal analysis of silicon micromachining based micro hotplates
基于硅微加工工艺的微热板传热分析 |
| 3. | Micromachining of monocrystal silicon by excimer laser direct etching
准分子激光直接刻蚀单晶硅研究 |
| 4. | Micromachining of wideband optical materials with ultra - short laser pulses
超短激光脉冲对宽带光学物质的微加工 |
| 5. | Formation of silicon pit and study on method of electrochemical micromachining of deep macropore array
硅诱导坑形成及深孔列阵电化学微加工工艺方案的探讨 |
| 6. | The concepts of " micromachining " and multi - chip - module ( mcm ) integrated from dc to rf components will be explained also
文中将涉及微加工技术以及从直流至射频的多芯片全集成新概念。 |
| 7. | The chip is fabricated using micromachining technology and porous silicon sacrificial - layer technique is used to realize the integrated structure
芯片利用微机械加工技术进行制作，采用了多孔硅牺牲层技术实现梁膜一体结构。 |
| 8. | This dissertation introduces the technique of bulk micromachining , and explains the fabrication process of this optical - switch on emphases
本论文在阐述了常用的微机械加工工艺的基础上，重点介绍了这种微机械光开关的制作过程。 |
| 9. | Laser microprocessing is a new branch of laser processing technology . it has been widely used in the fields of fine mechanical system and micromachining
激光微加工技术作为激光加工技术的一个新兴分支，已被越来越广泛地应用于精密机械加工、微机械制造等诸多领域。 |
| 10. | The capacitive accelerometers fabricated by bulk micromachining process have large sensitive mass , small noise and high resolution compared to the ones fabricated by surface micromachining process
用表面微机械制作的电容式传感器，其敏感质量较小、热机械噪声大、分辨率不摘要高。 |
