For liquid xe aerosol spray target , important lpp characteristics , such as laser - to - euv conversion efficiency , euv radiation absorption , debris production by target material erosion or deposition , are studied in detail , a 13 . 4nm conversion efficiency of 0 . 75 % into 2 % bandwidth and 2 steradian emission solid angle is achieved at 0 . 5mm laser - nozzle distance 在实验上，建成了一套高光谱分辨率和高灵敏度的软x射线脉冲辐射测量装置。测量了co _ 2 、 o _ 2 、 cf _ 4 、 kr和xe液体微滴喷射靶lpp光源在6 20nm波段的软x射线辐射光谱。
