Microelectronics fabrication ; semiconductor devices and integrated circuits 微电子制造；半导体器件及集成电路
2.
Gaas crystal is a kind of iii - v group compound semiconductor material with good electrical performance . the semiconductor devices and integrated circuit ( ic ) fabricated on gaas substrate have such advantages of hign - speed information processing that they have drawn the researcher ' s attention Gaas晶体是一种电学性能优越的-族化合物半导体材料，以其为衬底制作的半导体器件及集成电路，由于具有信息处理速度快等优点而受到青睐，成为近年来研究的热点。
