It is heated with transparent electric resistance heater and is cooled with liquid nitrogen 低温台属于对流型,以液氮为冷却介质,以导电镀膜提供热量。
2.
The input of the heater is controlled with proportional - integral - differential ( pid ) logic . the flux of the cooling fluid is regulated by electronic expansion valve 系统采用pid算法控制导电镀膜的加热量,同时使用电子膨胀阀调节冷却介质的流量。