Chinese translation for "干法刻蚀"
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- dry etch
Related Translations:
刻蚀: [地质学] sculpture; corrosion; mechanical erosion◇刻蚀法 etching method
- Example Sentences:
| 1. | Dry etching of molybdenum film in fabrication of thin film transistor liquid crystal display
液晶阵列工艺中金属钼的干法刻蚀研究 | | 2. | We use wet etching and rie to fabricate the awg device with tir mirrors respectively
采用湿法腐蚀和干法刻蚀两种工艺分别制作出了全内反射型awg器件。 | | 3. | Plasma etching has been widely used in the etching process of si devices . now the study is focused on the microfabrication of compound semiconductor
等离子体干法刻蚀在硅器件的微细加工中已经得到广泛应用，目前研究的焦点集中在化合物半导体。 | | 4. | When the output power of the rf is within 500w and the reflection power is within 10w , a good matching effect can be gained . insb - in material in the icp etching system is etched by chc1f2 plasma . through the sem analysis of the etching result , it can be observed that the sidewall is smooth , flat and anisotropic
在自制的icp干法刻蚀系统中用chclf _ 2等离子体对insb - in材料实现了干法刻蚀，通过对刻蚀样品的sem分析，观察到刻蚀后的侧壁光滑平整，有良好的各向异性。 | | 5. | This thesis work has researched the fabrication technics of photonic crystal defect waveguide with air - bridge structure and collecting waveguide ; suggested using uv - lithography and wet etching to fabricate traditional waveguide , after that , using eb - lithography and dry etching to fabricate photonic crystal holes , so can reduce the fabrication cost by a big range ; designed the moulding board , which can fabricate the air - bridge structure and is convenient for recognizing position in eb - lithography ; the structure consisted of traditional waveguides and etching grooves are fabricated on soi successfully , then an successful eb - lithography is realized on the structure , the defect waveguide collected with the traditional waveguide quite well ; used the etching grooves to do the sacrificial layer etching experiment , which grounded etching sacrificial layer by photonic crystal holes in next step
提出采用紫外光刻工艺制作传统波导结构之后，通过电子束曝光和干法刻蚀制作光子晶体小孔的工艺方案，大幅度减低了制作成本；设计出可形成空气桥结构、并且适用于电子束曝光位置识别的光刻模板，在soi材料上成功制作出带有空气桥刻蚀预留槽以及接续光波导的结构，在该结构上成功实现了光子晶体带隙波导的电子束曝光，带隙波导与接续光波导位置接续良好；最后利用预留槽进行了刻蚀牺牲层的实验，为下一步利用光子晶体小孔刻蚀牺牲层形成空气桥结构打下了基础。 | | 6. | The work mainly consists of four parts : the first part is to use oxidation and lpcvd technique to produce sio2 mask film and si3n4 insulation film in order to enhance the heating efficiency of micro chamber , and guarantee the carry out of the reaction . the second part is to use the combination of dry etching and wet etching to produce reaction micro chamber , it is the container which carry out the pcr reaction , and dna sample carry out amplification reaction here . the third part is to use the sputtering , photolithography to produce heaters and temperature sensors which heat the reaction micro chamber and provide the temperature condition for the pcr reaction
首先，利用氧化工艺和lpcvd技术，生长sio _ 2掩膜层和si _ 3n _ 4绝缘层，以提高反应腔的热效率，保证扩增反应的顺利进行；其次，用湿法腐蚀和干法刻蚀相结合的方法加工微型腔体，使之作为dna样品进行pcr扩增反应的容器；第三，用溅射、光刻等工艺在微型腔体底部制作微型加热器和温度传感器，实现对反应腔体的加热及其温度的精确测量，提供pcr扩增反应所需的温度条件。 |
- Similar Words：
- "干法静电复印色调剂" Chinese translation, "干法净化" Chinese translation, "干法净化纯净度" Chinese translation, "干法净化过程" Chinese translation, "干法净化系统" Chinese translation, "干法拉拔" Chinese translation, "干法拉丝" Chinese translation, "干法拉制" Chinese translation, "干法粒渣" Chinese translation, "干法炼油" Chinese translation
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