| 1. | Micro - electromechanical systems
微电子机械系统 |
| 2. | Micro electro mechanical syetem ( mems ) is a new and developing forward research field which arose in the late - , 1980s
微电子机械系统(简称微机械)是在八十年代后期崛起的一门新兴的前沿学科。 |
| 3. | Another important part of this paper is optimal design of a micro - electromechanical systems ( mems ) phased shifter using genetic algorithms ( gas )
将遗传算法应用于毫米波微电子机械系统( mems )相移器的设计和优化是本论文的一个重要组成部分。 |
| 4. | With the rapid development of micoelectromechanical systems ( mems ) , the study of the flow characteristics in microchannels has become a hot subject in the fluid mechanics
随着微电子机械系统（ mems ）技术的迅猛发展，微流动特性的研究已成为当前流体力学研究热点。 |
| 5. | Micro electro mechanical systems , mems , is a class of systems that are physically small , with dimensions in the micron ( 10 - 6meters / micron ) range . these systems have both electrical and mechanical components
微电子机械系统是由特征尺寸在亚微米至毫米范围内的电子和机械元件组成的微器件或微系统。 |
| 6. | Fabricating the nanoporous silicon membrane with nanotechnology and bio - mems technology , the thickness of membrane , pore size and distribution , geometry shape and porosity can precisely controlled
摘要采用纳米技术和生物微电子机械系统技术制备纳米多孔硅膜，可准确控制膜的厚度、几何形状、孔大小、孔分布和孔隙率。 |
| 7. | A new method for active control of flow field appears . it is the so - called microjet technology . its fundamental principle is based on the mems , the chaotic theory and non - linear complicated system theory
以微电子机械系统( mems ) 、混沌论及非线性复杂大系统不稳定理论为基础，一种全新的流场主动控制技术? ?微射流技术应运而生。 |
| 8. | In recent years , with micro - electro mechanical systems ( mems ) penetrating gradually through optics , a full new technique field - micro - opto - electro - mechanical systems ( moems ) came into being in 1990 ' s
最近几年来，微电子机械系统( mems )逐渐向光学方面渗透，在二十世纪九十年代中后期形成了全新的技术领域?微光机电系统( moems ) 。 |
| 9. | The design of thermal coupled structural system is a very common research problem in many industrial engineering such as astronautics , aerospace , engine and chemical machinery
尤其是在航空、航天、发动机、内燃机、热力机械、能源和化工等工业装备以及电子元器件、微电子机械系统等结构和产品的设计制造等方面，热传导与结构的耦合作用更为显著。 |
| 10. | Micro - electromechanical systems ( mems ) are micron - scale sensing and / or actuation devices integrated on a chip . with the development of microelectronic mechanical system , it is found wide application in industries and national defense
随着微电子机械系统( microelectronicmechanicalsystem ， mems )技术的兴起和发展， mems器件已大量应用于国防和民用产品。 |
