Microhardness tester indicate that the hardness increases with the increase of n2 flow rate ( ar flow rate is fixed ) and decreases with the increases of ar flow rate ( n2 flow rate is fixed ) 经用显微硬度计测试,我们发现随着n2流量的增加(固定ar流量) ,薄膜的硬度增高。随着ar流量的增加(固定n2流量)薄膜的硬度降低。