The system possesses dynamic range of scores of millimeters and focused time of 5 seconds and repeatability of 7 microns 聚焦范围可达几十上百毫米，聚焦时间为5秒钟，重复精度为7 m 。
2.
The system possesses dynamic range of scores of millimeters and focusing time of five seconds and repeatability of seven microns and measurement precision of microns level 聚焦范围可达几十毫米，聚焦时间为5秒钟，重复精度为7 。装配间隙宽度测量的精度为微米级。
