The fabrication parameters were preliminarily optimized . the morphology and composition of the samples of the diamond film for different b / c ratios was investigated by scanning electron micrograph ( sem ) and raman scattering spectroscopy ( raman ) . the content of different levels of b dopant in the diamond film was tested by secondary ion mass spectrometry ( sims ) 阐述了掺硼金刚石膜的制备工艺，研究了掺硼金刚石膜成核和生长的影响因素，初步优化了沉积掺硼金刚石膜工艺参数，同时对掺硼金刚石膜进行了扫描分析、拉曼分析、二次离子质谱分析和电阻率测试。
