| 1. | Optimal control for microvibration of a micro - manufacturing platform
微制造平台微振动的最优控制 |
| 2. | Research on real - time fsm modeling for microfabrication nc system
微制造数控系统的实时有限状态机建模研究 |
| 3. | After reading many related papers , this thesis firstly presents an analysis method of power transmission and does some simulations
本论文在分析大量国内外相关方面的论文，基于smr模型的功率流传递分析方法，对微制造隔振平台控制系统进行了仿真研究。 |
| 4. | Complex 3 - dimension ( 3d ) microstructures can be constructed using this technique with the advantages of being maskless , single step , real 3d structure and high resolution
我们展示了一个有潜力应用于组织工程及生医领域之新颖的微制造技术双光子吸收光致聚合法，它所使用之基材为液态高分子材料。 |
| 5. | The results of the simulations show that the the analysis method of power transmission can reduce the complexity when designing the platform structure and guarantee a good vibration isolation capability of the micro - manufatcuring platform
仿真研究表明：该方法可以降低微制造平台的设计复杂度，且保证微制造平台的较好的隔振性能。 |
| 6. | Synthesizing the results of the research of power transmission of smr model , the vibration isolation mechanism and the structure of a woodpecker ' s head and bionic mechanism , we desgn the micro - manufacturing platform
综合了smr模型的的功率流传递特性研究和啄木鸟头部的隔振机理和生理结构的研究，再结合仿生学的原理设计了微制造隔振平台。 |
| 7. | Micro electro mechanical systems ( abbreviated as mems ) , is a system device which uses micro manufacturing technology combining the mechanical unit , sensor , executing organ and electronic element to a micro base plate
微机电系统( microelectromechanicalsystems ,简称mems )是通过微制造技术将机械单元、传感器、执行器件和电子元件整合到一片微基板上的系统装置。 |
| 8. | This project name is " basic technique research and vibration isolation theory with bionic mechanism for devices of high precision " . this thesis is mainly in two aspects : theoretical analysis and experimental research . it is composed of the characteristic of power transmission based on the smr model , control theory of vibration isolation for micro - manufacturing platform
本学位论文结合国家自然科学基金项目“精密装置仿生隔振系统理论及基础技术研究” ( no . 50075078 ) ，从理论分析和实验研究两方面，对smr模型的功率传递特性、微制造隔振平台控制理论和主动振动控制技术进行了深入、系统的研究。 |
| 9. | The novel micro fabrication technology of excimer laser liga , gives more promise for micro technology in the 21st century . especially , in the fabrication process of novel biochip , direct writing technology of excimer laser shows a great superiority , compared with the cutting technology of general cnc machining tool
而以准分子liga制作技术为代表的新颖微加工方法的出现更使得微制造技术在新的世纪里充满了希望，尤其是在新型的生物芯片制作过程中，准分子光刻直写加工工艺表现出非凡的优越性。 |
| 10. | Therefor , the demands for manufacturing such mems devices are very critical . druing the manufacturing or masruing such devices , we need a very stable working platform , that is , making a deeper research on the basic technology and control theory of vibration and isolation for the platform
因此，对于这些微机电系统器件的制造技术提出了很高的要求，在制造、测量这些微小器件时，需要一个非常稳定的精密的操作平台，包括深入研究并解决微制造平台隔振控制理论和基础技术。 |
